Semiconductor device and method of fabricating the same

ABSTRACT

A semiconductor device including a substrate, a first transistor and a second transistor is provided. The first transistor includes a first gate structure over the first semiconductor fin. The first gate structure includes a first high-k layer and a first work function layer sequentially disposed on the substrate, a material of the first work function layer may include metal carbide and aluminum, and a content of aluminum in the first work function layer is less than 10% atm. The second transistor includes a second gate structure. The second gate structure includes a second high-k layer and a second work function layer sequentially disposed on the substrate. A work function of the first work function layer is greater than a work function of the second work function layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the priority benefit of U.S. provisionalapplication Ser. No. 62/904,651, filed on Sep. 23, 2019. The entirety ofthe above-mentioned patent application is hereby incorporated byreference herein and made a part of this specification.

BACKGROUND

A semiconductor device may require multiple components with differentdevice characteristics. For example, the component for computationallogic functions may require increased switching speed, and the componentfor memory storage functions may require decreased power consumption.Therefore, the design of the semiconductor device becomes complicate.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 schematically illustrates a plan view of a semiconductor devicein accordance with some embodiments.

FIG. 2 schematically illustrates a cross-sectional view of asemiconductor device taken along lines I-I and II-II in FIG. 1.

FIG. 3 schematically illustrates a cross sectional view of a portion ofa semiconductor device in accordance with some embodiments.

FIGS. 4-10 schematically illustrate a method of fabricating asemiconductor device in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Embodiments of the present disclosure may be used to form gate stackssuitable for use in planar bulk metal-oxide-semiconductor field-effecttransistors (MOSFETs), multi-gate transistors (planar or vertical) suchas FinFET devices, gate-all-around (GAA) devices, Omega-gate (a-gate)devices, or Pi-gate (H-gate) devices, as well as strained-semiconductordevices, silicon-on-insulator (SOI) devices, partially-depleted SOIdevices, fully-depleted SOI devices, or other devices as known in theart. In addition, embodiments disclosed herein may be employed in theformation of P-type and/or N-type devices. One of ordinary skill mayrecognize other embodiments of semiconductor devices that may benefitfrom aspects of the present disclosure. For example, some embodiments asdescribed herein may also be applied to the formation of contacts, vias,or interconnects.

The fins may be patterned by any suitable method. For example, the finsmay be patterned using one or more photolithography processes, includingdouble-patterning or multi-patterning processes. Generally,double-patterning or multi-patterning processes combine photolithographyand self-aligned processes, allowing patterns to be created that have,for example, pitches smaller than what is otherwise obtainable using asingle, direct photolithography process. For example, in one embodiment,a sacrificial layer is formed over a substrate and patterned using aphotolithography process. Spacers are formed alongside the patternedsacrificial layer using a self-aligned process. The sacrificial layer isthen removed, and the remaining spacers, or mandrels, may then be usedto pattern the fins.

FIG. 1 schematically illustrates a plan view of a semiconductor devicein accordance with some embodiments. Referring to FIG. 1, asemiconductor device 100 may include a substrate 102, a first transistor110, and a second transistor 120. The first transistor 110 and thesecond transistor 120 are disposed on the substrate 102. In someembodiments, the semiconductor device 100 may be an integrated circuitdevice typically provided in chip form and may be encapsulated in apackage. The semiconductor device 100 may include more than twotransistors while the first transistor 110 and the second transistor 120are illustrated as examples without the intention of limiting thenumbers of the transistors in the semiconductor device 100. In thesemiconductor device 100, thousands, or more, transistors may beinterconnected. In some embodiments, the first transistor 110 and thesecond transistor 120 may have different device characteristics and thusbe able to provide various functions. For example, the first transistor110 and the second transistor 120 may each be p-type transistor orn-type transistor. In accordance with some embodiments, one or moren-type transistor in the semiconductor device 100 may be interconnectedwith one or more p-type transistor, for example, by sharing a commongate structure, or may be connected by metal contacts (not shown).

The substrate 102 may be a bulk semiconductor substrate such as a bulksilicon wafer. The term “substrate” may be used to refer to just thesemiconductor substrate or a semiconductor substrate inclusive ofisolation regions. The substrate 102 may be or include anysilicon-containing substrate including, but not limited to, singlecrystal Si, polycrystalline Si, amorphous Si, or Si-on-insulator (SOI)substrates and the like, and may be n-type or p-type doped as desiredfor a particular application. The substrate 102 may also include othersemiconductors such as germanium, silicon carbide (SiC), silicongermanium (SiGe), or diamond. Alternatively, the substrate 102 mayinclude a compound semiconductor and/or an alloy semiconductor. Further,in some embodiments, the substrate 102 may include an epitaxial layer(epi-layer). The substrate 102 may have one or more fin structures forconstructing the transistors such as the first transistor 110 and thesecond transistor 120. The first transistor 110 and the secondtransistor 120 may be fin type field effect transistors (Fin FETs).

The first transistor 110 may include a first semiconductor fin 112, afirst gate structure 114, a first source 116 and a first drain 118. Insome embodiments, the first transistor 110 may include two or more firstsemiconductor fins 112 and each of the first semiconductor fins 112 maybe a linear structure. The first semiconductor fins 112 may be locatedbetween neighboring isolation regions in the substrate 102 in someembodiments. The first gate structure 114 is disposed over the firstsemiconductor fins 112. The first gate structure 114 may extend in adirection intersecting the extending direction of each of the firstsemiconductor fins 112 and cross through the first semiconductor fins112. The first source 116 and the first drain 118 are located at twoopposite sides of the first gate structure 114, and the firstsemiconductor fins 112 connect between the first source 116 and thefirst drain 118.

The second transistor 120 may have a similar top view structure to thefirst transistor 110. The second transistor 120 may include a secondsemiconductor fin 122, a second gate structure 124, a second source 126,and a second drain 128. In some embodiments, the second transistor 120may include two or more second semiconductor fins 122 and each of thesecond semiconductor fins 122 may be a linear structure on the substrate102. The second gate structure 124 is disposed over the secondsemiconductor fins 122. The second gate structure 124 may extend in adirection intersecting the extending direction of each of the secondsemiconductor fins 122 and cross through the second semiconductor fins122. The second source 126 and the second drain 128 are located at twoopposite sides of the second gate structure 124, and the secondsemiconductor fins 122 connect between the second source 126 and thesecond drain 128.

FIG. 2 schematically illustrates a cross-sectional view of asemiconductor device taken along lines I-I and II-II in FIG. 1.Referring to FIG. 2, the first semiconductor fin 112 and the secondsemiconductor fin 122 may be protruded structures on the substrate 102.A spacer 110S and a spacer 120S may be further disposed on the substrate102. The spacer 110S and the spacer 120S may be made of silicon nitride,SiCN, a combination thereof, or the like, and may include a plurality oflayers. The spacer 110S is disposed on the first semiconductor fin 112to define a recess structure on the substrate 102 with the firstsemiconductor fin 112 and the first gate structure 114 is disposed inthe recess structure defined by the spacer 110S. The first gatestructure 114 may be surrounded by the spacer 110S. Similarly, thespacer 120S may define a recess structure on the second semiconductorfin 122 and the second gate structure 124 may be surrounded by thespacer 120S.

In some embodiments, the first semiconductor fin 112 may have two dopedregions 112A located at opposite sides of a channel region 112B and thesecond semiconductor fin 122 may have two doped regions 122A located atopposite sides of a channel region 122B. The first gate structure 114 islocated above the channel region 112B and the second gate structure 124is located above the channel region 122B. In some embodiments, the dopedregions 112A and the doped regions 122A may include p-type dopantmaterial such as boron, aluminum, gallium, indium, or the like, orn-type dopant material such as phosphorus, arsenic, antimony, bismuth,lithium or the like. In some embodiments, lightly doped source/drain(LDD) regions (not shown) may be respectively disposed between thechannel region 112B and the doped regions 112A and between the channelregion 122B and the doped regions 122A, while the LDD regions may have adopant concentration less that the doped regions 112A and 122A. In someembodiments, the dopant material of the doped region 112A and the dopantmaterial of the doped region 122A may be different. In some embodiments,one of the first transistor 110 and the second transistor 120 may bep-type transistor and the other one may be n-type transistorcorresponding to the types of the dopant materials in the doped regions112A and 122A. Or, the first transistor 110 and the second transistor120 may both be the same type transistors with different thresholdvoltages.

In the first transistor 110, an insulating layer 110I is disposed on thechannel region 112B between the first semiconductor fin 112 and thefirst gate structure 114, and the insulating layer 110I may extend inthe bottom of the recess structure defined by the spacer 110S. Theinsulating layer 110I may be, for example, silicon oxide, siliconnitride, silicon oxynitride, a combination thereof, or the like, and maybe deposited or thermally grown on the first semiconductor fin 112according to acceptable techniques.

The first gate structure 114 is disposed on the insulating layer 110Iand surrounded by the spacer 110S. The first gate structure 114 mayinclude a first high-k layer 114A, a first work function layer 114B, afirst glue layer 114C and a first gate fill material 114D. The firsthigh-k layer 114A, the first work function layer 114B and the first gluelayer 114C may be sequentially deposited on the insulating layer 110I.Each of the first high-k layer 114A, the first work function layer 114Band the first glue layer 114C may be deposited by using physical vapordeposition (PVD), atomic layer deposition (ALD), chemical vapordeposition (CVD), sputtering, or other known processes, depending on thematerial composition of the layer. Each of the first high-k layer 114A,the first work function layer 114B and the first glue layer 114C mayconformally cover the corresponding underlying layer. The first high-klayer 114A, the first work function layer 114B and the first glue layer114C may define a recess structure and the first gate fill material 114Dmay fill the recess structure by using physical vapor deposition (PVD),Molecular-Beam Deposition (MBD), atomic layer deposition (ALD), chemicalvapor deposition (CVD), sputtering, or other known processes.

Similarly, in the second transistor 120, an insulating layer 1201 isdisposed on the channel region 122B between the second semiconductor fin122 and the second gate structure 124. The insulating layer 1201 may bemade of, for example, silicon oxide, silicon nitride, a combinationthereof, or the like, and may be deposited or thermally grown on thesecond semiconductor fin 122 according to acceptable techniques.

The second gate structure 124 is disposed on the insulating layer 1201and surrounded by the spacer 120S. The second gate structure 124 mayinclude a second high-k layer 124A, a second work function layer 124B, asecond glue layer 124C and a second gate fill material 124D. The secondhigh-k layer 124A, the second work function layer 124B and the secondglue layer 124C may be sequentially deposited on the insulating layer1201. Each of the second high-k layer 124A, the second work functionlayer 124B and the second glue layer 124C may be deposited by usingphysical vapor deposition (PVD), Molecular-Beam Deposition (MBD), atomiclayer deposition (ALD), chemical vapor deposition (CVD), sputtering, orother known processes, depending on the material composition of thelayer. Each of the second high-k layer 124A, the second work functionlayer 124B and the second glue layer 124C may conformally cover thecorresponding underlying layer. The second high-k layer 124A, the secondwork function layer 124B and the second glue layer 124C may define arecess structure and the second gate fill material 124D may fill therecess structure.

In some embodiments, the first high-k layer 114A and the second high-klayer 124A are formed by a common high-k material layer. The formationmethods of the common high-k material layer may include Molecular-BeamDeposition (MBD), ALD, PECVD, and the like. The common high-k materiallayer may have a dielectric constant greater than, for example, about3.9 (the dielectric constant of silicon dioxide) or greater than about7.0, and be made of, but not limited to, a metal oxide or a silicate ofHf, Al, Zr, La, Mg, Ba, Ti, Pb, and combinations thereof. Alternatively,the common high-k material layer may include other high-k dielectrics,such as TiO₂, HfZrO, Ta₂O₃, HfSiO₄, ZrO₂, ZrSiO₂, LaO, AlO, ZrO, TiO,Ta₂O₅, Y₂O₃, SrTiO₃ (STO), BaTiO₃ (BTO), BaZrO, HfZrO, HfLaO, HfSiO,LaSiO, AlSiO, HfTaO, HfTiO, (Ba,Sr)TiO₃ (BST), Al₂O₃, Si₃N₄, oxynitrides(SiON), combinations thereof, or other suitable material. In someembodiments, one or more capping layer may be disposed on the commonhigh-k material layer to protect the first high-k layer 114A and thesecond high-k layer 124A from damage during subsequent processing steps.The material of the capping layer may include titanium nitride (TiN) ortantalum nitride (TaN).

The material of the first work function layer 114B may include Ti, Aland C. In some embodiments, the material of the first work functionlayer 114B may be metal carbide, for example, titanium carbide (TiC). Insome embodiments, the first work function layer 114B may be formed in anatomic layer deposition (ALD) chamber. For example, the first workfunction layer 114B may be formed by depositing a material of the firstwork function layer 114B on the first high-k layer 114A by using a firstprecursor and a second precursor. The first precursor may include metalchloride, and the second precursor may include tri-methyl-aluminum(TMA). The first precursor such as TiCl₄ and the second precursor suchas TMA may by supplied into the ALD chamber that may operable to depositthe material of the first work function layer 114B under a temperatureof about 250° C. to about 600° C. and a pressure of about 0.5 torr toabout 40 torr, but not limited thereto. In some embodiments, thematerial of the first work function layer 114B may be deposited at atemperature ranged from about 300° C. to about 500° C. and Al in thedeposited first work function layer 114B may be less than 10% atm. Thefirst precursor may be supplied into the ALD chamber in a pulse time ofabout 0.1 seconds to about 30 minutes and a flow rate of about 500 sccmto about 9,000 sccm. The second precursor may be supplied into the ALDchamber in a pulse time of 0.1 seconds to 30 minutes and a flow rate of500 sccm to 9,000 sccm. However, the above temperature, pressure, pulsetime and flow rate may be adjusted based on the types of the materialand the required deposited layer. In some embodiments, the depositedmaterial by using TiCl₄ and TMA as the precursors may include TiC withadditional material selected from at least one of Al, O and Cl. Thus,the material of the first work function layer 114B may include TiC andadditional material selected from at least one of Al, O and Cl. In someembodiments, the material of the first work function layer 114B mayinclude aluminum with a content of less than 10% atm The first workfunction layer 114B may have a work function, similar to TiN or Ti—Si—N,for example, about 4.9 ev and serve as a p-type work function layer insome embodiments, but is not limited thereto. In some embodiments, thecontent of Al in the first work function layer 114B may be differentunder different deposition conditions, for example, temperature and thework function of the first work function layer 114B may be determinedbased on the content of Al. Accordingly, the first work function layer114B may be applied to the transistors having various thresholdvoltages.

The material of the second work function layer 124B is different fromthe first work function layer 114B. For example, a material of thesecond work function layer 124B may include metal or metal carbide. Amaterial of the second work function layer 124B may be at least oneselected from TiAl, TiAlC, TaC, TaAlC, NbC, and VC. In some embodiments,a material of the second work function layer 124B may include aluminumwith a content of more than 10% atm. The work function of the first workfunction layer 114B may be greater than the work function of the secondwork function layer 124B. In some embodiments, the second work functionlayer 124B may serve as an n-type work function layer.

In the method of manufacturing the semiconductor device 100, thematerial of the first work function layer 114B and the material of thesecond work function layer 124B may be deposited alternately on thecommon high-k material layer forming the first high-k layer 114A and thesecond high-k layer 124A. For example, the material of the first workfunction layer 114B may be firstly deposited on the common high-kmaterial layer forming the first high-k layer 114A and the second high-klayer 124A. A portion of the material of the first work function layer114B that covers the recess structure defined by the secondsemiconductor fin 122 and the spacer 120S may be removed by a patterningprocess. Subsequently, the material of the second work function layer124B may be deposited to cover the U-shape structure defined by thesecond semiconductor fin 122 and the spacer 120S. In some embodiments, aportion of the material of the second work function layer 124B may coverthe first work function layer 114B and may be removed based on variousdevice designs.

A common glue layer forming the first glue layer 114C and the secondglue layer 124C may be formed to cover the first work function layer114B and the second work function layer 124B. The material of the firstglue layer 114C and the second glue layer 124C may include TiN orsimilar material. The first glue layer 114C and the second glue layer124C may conformally cover the first work function layer 114B and thesecond work function layer 124B to define respective recess structuresand a gate fill material such as W, TiN, TaN, WN, Re, Ir, Ru, Mo, Al,Cu, Co, Ni, combinations thereof, and/or other suitable compositions maybe deposited in the respective recess structures to form the first gatefill material 114D and the second gate fill material 124D. Subsequent tofilling gate fill material, a planarization process such as chemicalmechanical polishing (CMP) process may be performed to remove extramaterial to form the first gate structure 114 and the second gatestructure 124. The first high-k layer 114A, the first work functionlayer 114B, the first glue layer 114C and the first gate fill material114D may construct a common top surface with the spacer 110S. The secondhigh-k layer 124A, the 124, the second glue layer 124C and the secondgate fill material 124D may construct a common top surface with thespacer 120S.

FIG. 3 schematically illustrates a cross sectional view of a portion ofa semiconductor device in accordance with some embodiments. In FIG. 3, asemiconductor device 200 may have a cross sectional structure similar tothe cross sectional structure of the semiconductor device 100 shown inFIG. 2. The semiconductor device 200 may include a first transistor 210and a second transistor 220, and the first transistor 210 and the secondtransistor 220 may be disposed on a common substrate 202. The materialsand the details of the substrate 202 are similar to the substrate 102described in the previous embodiment and are not reiterated here.

The first transistor 210 may include a first semiconductor fin 212 and afirst gate structure 214 over the first semiconductor fin 212. In someembodiments, the first transistor 210 may have a top view structuresimilar to the top view structure of the first transistor 110 shown inFIG. 1 and further include the source and the drain positioned at twoopposite sides of the first gate structure 214. The first semiconductorfin 212 may be similar to the first semiconductor fin 112 in structureand formed on the substrate 202. The first semiconductor fin 212 mayhave two doped regions 212A and a channel region 212B between the twodoped regions 212A. The first gate structure 214 is disposed over thechannel region 212B and positioned between the two doped regions 212A.In some embodiments, the first transistor 210 may further include aspacer 210S disposed on the first semiconductor fin 212. The spacer 210Sand the first semiconductor fin 212 may define a recess structure in thecross section above the channel region 212B, and the first gatestructure 214 is disposed in the recess structure with an insulatinglayer 2101 disposed between the first gate structure 214 and the firstsemiconductor fin 212. The materials and the details of the firstsemiconductor fin 212, the spacer 210S and the insulating layer 2101 aresimilar to the first semiconductor fin 112, the spacer 110S and theinsulating layer 110I described in the previous embodiment and are notreiterated here.

The first gate structure 214 may include a first high-k layer 214A and asequentially disposed on the first semiconductor fin 212, while aninsulating layer 2101 may be disposed between the first gate structure214 and the first semiconductor fin 212. A material of the first workfunction layer 214B may include metal carbide and aluminum, and acontent of aluminum in the first work function layer 214B may be lessthan 10% atm. In addition, the first gate structure 214 may furtherinclude a first glue layer 214C and a first gate fill material 214D. Thefirst gate fill material 214D is disposed on the first work functionlayer 214B and the first glue layer 214C is disposed between the firstgate fill material 214D and the first work function layer 214B. Thefirst high-k layer 214A, the first glue layer 214C and the first gatefill material 214D are similar to the first high-k layer 114A, the firstglue layer 114C and the first gate fill material 114D described in theprevious embodiment, and the materials and the details thereof are notreiterated here.

The second transistor 220 may have a structure similar to the firsttransistor 210. The second transistor 220 may include a secondsemiconductor fin 222 and a second gate structure 224 over the secondsemiconductor fin 222. The second semiconductor fin 222 may have twodoped regions 222A and a channel region 222B between the two dopedregions 222A. The second gate structure 224 is disposed over the channelregion 222B, and positioned between the two doped regions 222A. In someembodiments, the second transistor 220 may further include a spacer 220Sdisposed on the second semiconductor fin 222. The second gate structure224 may be surrounded by the spacer 220S and include a second high-klayer 224A and a second work function layer 224B sequentially disposedon the second semiconductor fin 222, while an insulating layer 2201 maybe disposed between the second gate structure 224 and the secondsemiconductor fin 222. The second gate structure 224 may further includea second glue layer 224C and a second gate fill material 224D. Thesecond glue layer 224C is disposed between the second gate fill material224D and the second work function layer 224B. A material of the secondwork function layer 224B may include metal carbide and aluminum, and acontent of aluminum in the second work function layer 224B is less than10% atm. The material of the first work function layer 214B may besimilar to the material of the second work function layer 224B, but thethickness of the second work function layer 224B may be different fromthe thickness of the first work function layer 214B. In addition, thethreshold voltage of the first transistor 210 may be different from thethreshold voltage of the second transistor 220.

In some embodiments, the materials and the manufacturing methods of thespacers 210S and 220S, the insulating layers 2101 and 2201, the firsthigh-k layer 214A, the second high-k layer 224A, the first glue layer214C, the second glue layer 224C, the first gate fill material 214D andthe second gate fill material 224D may refer to the descriptions for thespacers 110S and 120S, the insulating layers 110I and 1201, the firsthigh-k layer 114A, the second high-k layer 124A, the first glue layer114C, the second glue layer 124C, the first gate fill material 114D andthe second gate fill material 124D.

In some embodiments, the first high-k layer 214A, the first workfunction layer 214B, and the first glue layer 214C may conformally coverthe recess structure defined by the spacer 210S and the firstsemiconductor fin 212, and the first gate fill material 214D fills therecess structure of the first glue layer 214C. Similarly, the secondhigh-k layer 224A, the second work function layer 224B, and the secondglue layer 224C may conformally cover the recess structure defined bythe spacer 220S and the second semiconductor fin 222, and the secondgate fill material 224D fills the recess structure of the second gluelayer 224C. In addition, the first high-k layer 214A and the secondhigh-k layer 224A may be formed by a common high-k layer with a high-kmaterial such as hafnium oxide, tantalum oxide, zirconium oxide,titanium oxide, or aluminum oxide. The first glue layer 214C and thesecond glue layer 224C may be formed by a common glue layer with amaterial such as TiN. The first gate fill material 214D and the secondgate fill material 224D may be formed of a common gate fill materialsuch as Co, Ru, Al, W, combinations thereof, or multi-layers thereof.

The first work function layer 214B and the second work function layer224B may be made of the same or similar material, but have differentthicknesses. In some embodiments, a first common work function layer maybe formed on the common high-k layer forming the first high-k layer 214Aand the second high-k layer 224A by, for example, ALD depositingprocess. During the ALD depositing process, a first precursor and asecond precursor are supplied into the ALD depositing chamber. In someembodiments, the first precursor may be TiCl₄ and the second precursormay be TMA. The deposited first common work function layer may be madeof TiC and may also include additional material such as at least one ofAl, C, and O. The content of Al in the first common work function layermay be less than 10% atm. Next, a second common work function layer maybe formed on the first common work function layer by using the same orsimilar process of forming the first common work function layer. Thesecond common work function layer may have the same or similar materialto the first common work function layer. Subsequently, a portion of thesecond common work layer is removed to form the first work functionlayer 214B and another portion of the second common work function layerwith the underlying first common work function layer may form the secondwork function layer 224B. The thickness of the first work function layer214B is smaller than the thickness of the second work function layer224B.

In some alternative embodiments, a mask (not shown) may be formed on thecommon high-k layer to cover a portion of the first common work functionlayer that is predetermined to form the first high-k layer 214A. Thesecond common work function layer may be partially formed on the firstcommon work function layer and partially formed on the mask. The maskmay be removed after the formation of the second common work functionlayer and a portion of the second common work function layer coveringthe mask may be simultaneously removed, such that a portion of the firstcommon work function layer is not covered by the second common workfunction layer to form the first work function layer 214B and anotherportion of the first common work function layer is covered by the secondcommon work function layer such that the stacking of the first commonwork function layer and the second common work function layer forms thesecond work function layer 224B. As such, the first work function layer214B and the second work function layer 224B may be different inthickness.

The common glue layer for forming the first glue layer 214C and thesecond glue layer 224C is formed to cover the first common work functionlayer and the second common work function layer in a conformal manner sothat the common glue layer may define recess structures corresponding tothe spacer 210S and the spacer 220S. The common gate fill material mayfill the recess structures of the common glue layer. Subsequently, aplanarization process such as chemical mechanical polishing (CMP)process may be performed to remove extra material to form the first gatestructure 214 and the second gate structure 224 with the first workfunction layer 214B having different thicknesses from the second workfunction layer 224B.

FIGS. 4-10 schematically illustrate a method of fabricating asemiconductor device in accordance with some embodiments. In FIG. 4,semiconductor fins 312, 322, and 332 are formed on a substrate 302. Eachof the semiconductor fins 312, 322, and 332 may have a linear structurein the top view, which is similar to the top view structures of thefirst and second semiconductor fins 112 and 122 shown in FIG. 1. Thesemiconductor fin 312 may have two doped regions 312A separated by achannel region 312B, the semiconductor fin 322 may have two dopedregions 322A separated by a channel region 322B, and the semiconductorfin 332 may have two doped regions 332A separated by a channel region332B. An insulating layer 3101 may be formed on the channel region 312Bof the semiconductor fin 312, an insulating layer 3201 may be formed onthe channel region 322B of the semiconductor fin 322, and an insulatinglayer 3301 may be formed on the channel region 332B of the semiconductorfin 332. In some embodiments, a spacer 310S may be formed on thesemiconductor fin 312 to form a recess structure over the semiconductorfin 312, a spacer 320S may be formed on the semiconductor fin 322 toform a recess structure over the semiconductor fin 322, and a spacer330S may be formed on the semiconductor fin 332 to form a recessstructure over the semiconductor fin 332.

A common high-k layer 304 is formed on the substrate 302 by usingphysical vapor deposition (PVD), atomic layer deposition (ALD), chemicalvapor deposition (CVD), sputtering, or other known processes. The commonhigh-k layer 304 may have a dielectric constant greater than, forexample, about 3.9 (the dielectric constant of silicon dioxide) or about7.0, and include, but not limited to, one or more of hafnium oxide,tantalum oxide, zirconium oxide, titanium oxide, or aluminum oxide. Aportion of the common high-k layer 304 covers the recess structure ofthe spacer 310S in a conformed manner to serve as a high-k layer 314A, aportion of the common high-k layer 304 covers the recess structure ofthe spacer 320S in a conformed manner to serve as a high-k layer 324A,and a portion of the common high-k layer 304 covers the recess structureof the spacer 330S in a conformed manner to serve as a high-k layer334A.

Next, a common work function layer 306 is formed on the common high-klayer 304. The common work function layer 306 may be formed bydepositing a material of the work function layer on the common high-klayer 304 by using a first precursor and a second precursor. In someembodiments, the first precursor may include metal chloride, and thesecond precursor may include tri-methyl-aluminum (TMA). In someexamples, the first precursor may be TiCl₄, and the deposited commonwork function layer 306 may be made of TiC. In some alternativeembodiments, the material of the common work function layer 306 mayfurther include at least one of Al, Cl, and O. In the common workfunction layer 306, aluminum is with a content of less than 10% atm. Thecommon work function layer 306 may include a first portion 306A coveringthe high-k layer 314A, a second portion 306B covering the high-k layer324A and a third portion 306C covering the high-k layer 334A. In someembodiments, one or more capping layer (not shown) may be formed on thecommon high-k layer 304 prior to the formation of the common workfunction layer 306. In some examples, the cap layer may be or includetitanium nitride (TiN) or tantalum nitride (TaN) to protect the commonhigh-k layer 304 from damage during the subsequent process.

Referring to FIG. 4 and FIG. 5 together, the common work function layer306 may be patterned by removing the second portion 306B covering thehigh-k layer 324A and the third portion 306C covering the high-k layer334A. The first portion 306A remains on the high-k layer 314A. In someembodiments, one or more capping layer may be formed between the high-klayer 324A and the common work function layer 306 and between the high-klayer 334A and the common work function layer 306 so that the damage ofthe high-k layer 324A and the high-k layer 334A due to the patterningprocess of the common work function layer 306 may be prevented. In somealternative embodiments, the etchant used for patterning the common workfunction layer 306 may have a good selectivity between the common workfunction layer 306 and the common high-k layer 304 so as to prevent thecommon high-k layer 304 from unintentional damage.

Referring to FIG. 6, another common work function layer 308 is formed onthe substrate 302. In some embodiments, the common work function layer308 may be formed by using the same or similar method of forming thecommon work function layer 306. The material of the common work functionlayer 308 may include TiC. The material of the common work functionlayer 308 may further include Al, O, Cl, etc., while a content of Al inthe common work function layer 308 may be less than 10% atm. The commonwork function layer 308 includes a first portion 308A covering theremained first portion 306A of the previously formed common workfunction layer 306 over the high-k layer 314A, a second portion 308Bcovering the high-k layer 324A and a third portion 308C covering thehigh-k layer 334A.

Referring FIG. 6 and FIG. 7 together, the common work function layer 308may be patterned by removing the third portion 308C. The first portion308A of the common work function layer 308 may remain on the firstportion 306A over the high-k layer 314A, and the second portion 308B mayremain on the high-k layer 324A. In some embodiments, one or morecapping layer may be formed between the high-k layer 334A and the commonwork function layer 308 so that the damage of the high-k layer 334A dueto the patterning process of the common work function layer 308 may beprevented. In some alternative embodiments, the etchant used forpatterning the common work function layer 308 may have a goodselectivity between the common work function layer 308 and the high-klayer 334A so as to prevent the high-k layer 334A from unintentionaldamage.

Referring to FIG. 8, a further common work function layer 309 may beformed on the substrate 302 by physical vapor deposition (PVD), atomiclayer deposition (ALD), chemical vapor deposition (CVD), sputtering, orother known processes. The further common work function layer 309 may bemade of metal or metal carbide. In some embodiments, the material of thecommon work function layer 309 may include at least one selected fromTiAl, TiAlC, TaC, TaAlC, NbC, and VC. The common work function layer 309may include Al with a content of more than 10% atm. The previouslyformed common work function layers 306 and 308 may have a work functiongreater than the common work function layer 309. In some embodiments,the common work function layers 306 and 308 may have a characteristicsimilar to p-type work function layer and the common work function layer309 may have a characteristic similar to n-type work function layer, butis not limited thereto.

Referring FIG. 8 and FIG. 9 together, the common work function layer 309may be patterned by removing the first portion 309A covering the firstportion 308A of the common work function layer 308. The second portion309B may remain on the second portion 308B of the common work functionlayer 308. The third portion 309C of the common work function layer 309may remain on the high-k layer 334A.

Referring to FIG. 9 and FIG. 10, a common glue layer and a common gatefill material are then sequentially formed on the substrate 302. Thecommon glue layer may include a glue layer 314C covering the firstportion 308A of the common work function layer 308, a glue layer 324Ccovering the second portion 309B of the common work function layer 309,and a glue layer 334C covering the third portion 309C of the common workfunction layer 309. The glue layer 314C, the glue layer 324C and theglue layer 334C may be formed to define recess structures correspondingto the spaces 310S, 320S and 330S, respectively. The common gate fillmaterial may include a gate fill material 314D filling the recessstructure defined by the glue layer 314C, a gate fill material 324Dfilling the recess structure defined by the glue layer 324C, and a gatefill material 334D filling the recess structure defined by the gluelayer 334C. Subsequently, a planarization process such as chemicalmechanical polishing (CMP) process may be performed to remove extramaterial to form individual gate structures 314, 324 and 334.

The first portion 306A of the common work function layer 306 and thefirst portion 308A of the common work function layer 308 mayrespectively serve as a first sub layer and a second sub layer of a workfunction layer 314B. The gate structure 314 may include the high-k layer314A, the work function layer 314B, the glue layer 314C and the gatefill material 314D, wherein the high-k layer 314A, the work functionlayer 314B, the glue layer 314C and the gate fill material 314D may forma common top surface for contacting with another conductive material oranother component. In the work function layer 314B, the material of thefirst sub layer (the first portion 306A of the common work functionlayer 306) and the material of the second sub layer (the first portion308A of the common work function layer 308) may be of the same material.In some alternative embodiments, the first portion 308A of the commonwork function layer 308 may be removed and the work function layer 314Bmay only include the first portion 306A of the common work functionlayer 306.

The second portion 308B of the common work function layer 308 and thesecond portion 309B of the common work function layer 309 sequentiallycovering the high-k layer 324A may respectively serve as a first sublayer and a second sub layer of a work function layer 324B. The gatestructure 324 may include the high-k layer 324A, the work function layer324B, the glue layer 324C and the gate fill material 324D, wherein thehigh-k layer 324A, the work function layer 324B, the glue layer 324C andthe gate fill material 324D may form a common top surface for contactingwith another conductive material or another component. The work functionlayer 324B may include the first sub layer (the second portion 308B ofthe common work function layer 308) and the second sub layer (the secondportion 309B of the common work function layer 309) made of differentmaterials, and the first sub layer (the second portion 308B of thecommon work function layer 308) that is adjacent to the high-k layer324A may be of the same material of the work function layer 314B.

The third portion 309C of the common work function layer 309 coveringthe high-k layer 334A forms a work function layer 334B. The gatestructure 334 may include the high-k layer 334A, the work function layer334B, the glue layer 334C and the gate fill material 334D, wherein thehigh-k layer 334A, the work function layer 334B, the glue layer 334C andthe gate fill material 334D may form a common top surface for contactingwith another conductive material or another component.

The gate structures 314, 324 and 334 respectively disposed over thesemiconductor fins 312, 322 and 332 may construct transistors 310, 320and 330 of a semiconductor device 300. The work function layer 314B andthe first sub layer of the work function layer 324B may be made of thesame or similar material. The transistor 310 and the transistor 320 maybe the same type transistors but have different threshold voltages. Insome embodiments, the work function of the work function layer 314B maybe greater than the work function of the work function layer 324B. Thework function layer 334B may have a material having differentelectricity characteristics from the work function layer 314B and thefirst sub layer of the work function layer 324B. The transistor 330 maybe a different type transistor from the transistor 310 and thetransistor 320. In some instances, the work functions of the workfunction layers 314B and 324B may be greater than the work function ofthe work function layer 334B. In some embodiments, the transistor 310and the transistor 320 may be p-type transistors and the transistor 330may be n-type transistor. The transistor 320 may present a devicecharacteristic intermediated between the transistor 310 and thetransistor 330.

As discussed above, the semiconductor device may have multipletransistors with different device characteristics. The work functionlayer in one transistor may be different from the work function layer inanother transistor, such that the two transistors may have differentthreshold voltages. In accordance with some embodiments, the workfunction layers in different transistors may be made by using theprecursors such as TiCl₄ and TMA. The work function layers in differenttransistors may include similar or the same material, but have differentthicknesses. As such, the transistors may be the same type transistorsbut have different threshold voltages. In some examples, the workfunction layer may be made of metal carbide with Al with a content lessthan 10% atm. The threshold voltage of the transistor having the workfunction layer may be adjustable by the thickness of the work functionlayer. Accordingly, multiple transistors with various devicecharacteristics in the semiconductor device may be achieved.

In accordance with some embodiments of the disclosure, a semiconductordevice includes a substrate, a first transistor and a second transistor.The first transistor is disposed on the substrate, and includes a firstsemiconductor fin and a first gate structure over the firstsemiconductor fin. The first gate structure includes a first high-klayer and a first work function layer sequentially disposed on the firstsemiconductor fin, a material of the first work function layer mayinclude metal carbide and aluminum, and a content of aluminum in thefirst work function layer is less than 10% atm. The second transistor isdisposed on the substrate, and includes a second semiconductor fin and asecond gate structure over the second semiconductor fin. The second gatestructure includes a second high-k layer and a second work functionlayer sequentially disposed on the second semiconductor fin. A workfunction of the first work function layer is greater than a workfunction of the second work function layer.

In accordance with some embodiments of the disclosure, a semiconductordevice includes a substrate and a first transistor. The first transistormay be disposed on the substrate, and include a first semiconductor finand a first gate structure over the first semiconductor fin. The firstgate structure may include a first high-k layer and a first workfunction layer sequentially disposed on the first semiconductor fin, anda material of the first work function layer may include Ti, Al and C,wherein a content of aluminum in the first work function layer is lessthan 10% atm.

In accordance with some embodiments of the disclosure, a method offabricating a semiconductor device includes: forming a semiconductor finon a substrate; forming a high-k layer on the semiconductor fin; andforming a work function layer on the high-k layer, wherein the formingthe work function layer may include depositing a material of the workfunction layer on the high-k layer by using a first precursor and asecond precursor, the first precursor includes metal chloride, thesecond precursor includes tri-methyl-aluminum.

In accordance with some embodiments of the disclosure, the metal carbidemay include titanium carbide. The material of the first work functionlayer may further include at least one selected from O, and Cl. Athickness of the second work function layer may be different from athickness of the first work function layer. A material of the secondwork function layer may include aluminum with a content of more than 10%atm. The first gate structure may further include a first gate fillmaterial disposed on the first work function layer, and the second gatestructure may further include a second gate fill material disposed onthe second work function layer. The first high-k layer and the secondhigh-k layer may be of the same material. A third transistor may befurther disposed on the substrate, and include a third semiconductor finand a third gate structure over the third semiconductor fin. The thirdgate structure may include a third high-k layer and a third workfunction layer sequentially disposed on the third semiconductor fin. Amaterial of the third work function layer is different from the materialof the first work function layer. The second work function layer of thesecond gate structure may include a first sub layer and a second sublayer sequentially disposed on the second high-k layer, a material ofthe first sub layer is the same as the first work function layer, and amaterial of the second sub layer is different from the first workfunction layer.

In accordance with some embodiments of the disclosure, the material ofthe first work function layer may further include at least one selectedfrom O and Cl. The first gate structure may further include a first gatefill material disposed on the first work function layer. A secondtransistor may be further disposed on the substrate, and include asecond semiconductor fin and a second gate structure over the secondsemiconductor fin. The second gate structure may include a second high-klayer and a second work function layer sequentially disposed on thesecond semiconductor fin. The material of the second work function layermay include aluminum with a content of more than 10% atm. The secondgate structure may further include a second gate fill material disposedon the second work function layer. The first high-k layer and the secondhigh-k layer are of the same material. A third transistor may be furtherdisposed on the substrate, and include a third semiconductor fin and athird gate structure over the third semiconductor fin. The third gatestructure may include a third high-k layer and a third work functionlayer sequentially disposed on the third semiconductor fin. The secondwork function layer of the second gate structure may include a first sublayer and a second sub layer sequentially disposed on the second high-klayer. The first sub layer may include a material the same as the firstwork function and the second sub layer may include a material the sameas the third work function layer.

In accordance with some embodiments of the disclosure, the metalchloride may include TiCl₄ and the metal carbide may include TiC. Thematerial of the work function layer may further include aluminum with acontent of less than 10% atm.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor device comprising: a substrate; afirst transistor disposed on the substrate, and comprising a first gatestructure, wherein the first gate structure comprises a first high-klayer and a first work function layer sequentially disposed on thesubstrate, a material of the first work function layer comprises metalcarbide and aluminum, and a content of aluminum in the first workfunction layer is less than 10% atm; and a second transistor disposed onthe substrate, and comprising a second gate structure, the second gatestructure comprising a second high-k layer and a second work functionlayer sequentially disposed on the substrate, wherein a work function ofthe first work function layer is greater than a work function of thesecond work function layer.
 2. The semiconductor device of claim 1,wherein the metal carbide comprises titanium carbide.
 3. Thesemiconductor device of claim 1, wherein the material of the first workfunction layer further comprises at least one selected from O and Cl. 4.The semiconductor device of claim 1, wherein a thickness of the secondwork function layer is different from a thickness of the first workfunction layer.
 5. The semiconductor device of claim 1, wherein amaterial of the second work function layer comprises aluminum with acontent of more than 10% atm.
 6. The semiconductor device of claim 1,wherein the first gate structure further comprises a first gate fillmaterial disposed on the first work function layer, and the second gatestructure further comprises a second gate fill material disposed on thesecond work function layer.
 7. The semiconductor device of claim 1,wherein the first high-k layer and the second high-k layer are of thesame material.
 8. The semiconductor device of claim 1, furthercomprising: a third transistor disposed on the substrate, and comprisinga third gate structure over the third semiconductor fin, wherein thethird gate structure comprises a third high-k layer and a third workfunction layer sequentially disposed on the substrate, and a material ofthe third work function layer is different from the material of thefirst work function layer.
 9. The semiconductor device of claim 1,wherein the second work function layer of the second gate structurecomprises a first sub layer and a second sub layer sequentially disposedon the second high-k layer.
 10. The semiconductor device of claim 9,wherein a material of the first sub layer is the same as the first workfunction layer, and a material of the second sub layer is different fromthe first work function layer.
 11. A semiconductor device comprising: asubstrate; and a first transistor disposed on the substrate, andcomprising a first gate structure, wherein the first gate structurecomprises a first high-k layer and a first work function layersequentially disposed on the substrate, and a material of the first workfunction layer comprises Ti, Al and C, wherein a content of aluminum inthe first work function layer is less than 10% atm.
 12. Thesemiconductor device of claim 11, wherein the material of the first workfunction layer further comprises at least one selected from O and Cl.13. The semiconductor device of claim 11, wherein the first gatestructure further comprises a first gate fill material disposed on thefirst work function layer.
 14. The semiconductor device of claim 11,further comprising: a second transistor disposed on the substrate, andcomprising a second gate structure, wherein the second gate structurecomprises a second high-k layer and a second work function layersequentially disposed on the substrate, and the material of the secondwork function layer comprises aluminum with a content of more than 10%atm.
 15. The semiconductor device of claim 14, wherein the second gatestructure further comprises a second gate fill material disposed on thesecond work function layer.
 16. The semiconductor device of claim 14,wherein the first high-k layer and the second high-k layer are of thesame material.
 17. The semiconductor device of claim 14, furthercomprising: a third transistor disposed on the substrate, and comprisinga third gate structure, wherein the third gate structure comprises athird high-k layer and a third work function layer sequentially disposedon the substrate, the second work function layer of the second gatestructure comprises a first sub layer and a second sub layersequentially disposed on the second high-k layer, the first sub layercomprises a material the same as the first work function, and the secondsub layer comprises a material the same as the third work functionlayer.
 18. A method of fabricating a semiconductor device, comprising:forming a high-k layer on a substrate; and forming a work function layeron the high-k layer, wherein the forming the work function layercomprises depositing a material of the work function layer on the high-klayer by using a first precursor and a second precursor, the firstprecursor comprises metal chloride, the second precursor comprisestri-methyl-aluminum.
 19. The method of claim 18, wherein the metalchloride comprises TiCl₄.
 20. The method of claim 18, wherein a materialof the work function layer further comprises aluminum with a content ofless than 10% atm.